Title:
金属酸化物含有膜形成用組成物、金属酸化物含有膜、金属酸化物含有膜形成基板及びこれを用いたパターン形成方法
Document Type and Number:
Japanese Patent JP4793592
Kind Code:
B2
Abstract:
A metal oxide-containing film is formed from a heat curable composition comprising (A) a metal oxide-containing compound obtained through hydrolytic condensation between a hydrolyzable silicon compound and a hydrolyzable metal compound, (B) a hydroxide or organic acid salt of Li, Na, K, Rb or Cs, or a sulfonium, iodonium or ammonium compound, (C) an organic acid, and (D) an organic solvent. The metal oxide-containing film ensures effective pattern formation.
Inventors:
Tsutomu Ogiwara
Takashi Ueda
Shunji Yano
Mutsuko Nakajima
Takashi Ueda
Shunji Yano
Mutsuko Nakajima
Application Number:
JP2007303130A
Publication Date:
October 12, 2011
Filing Date:
November 22, 2007
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C08L85/00; C08G79/00; C08K5/09; G03F7/11; G03F7/26; H01L21/027; H01L21/3065
Domestic Patent References:
| JP2007163846A | ||||
| JP2004191386A | ||||
| JP2002311591A | ||||
| JP2003215792A | ||||
| JP2005350558A | ||||
| JP3259924A | ||||
| JP9113704A | ||||
| JP7238172A | ||||
| JP2008019423A | ||||
| JP2009030006A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa