Title:
スルホニル構造を有する化合物、それを用いた感放射線性酸発生剤、ポジ型感放射線性樹脂組成物、及びネガ型感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP4120437
Kind Code:
B2
Inventors:
Kenichi Yokoyama
Rui Ebata
Wang Yong
Tomoki Nagai
Junichiro Inaba
Rui Ebata
Wang Yong
Tomoki Nagai
Junichiro Inaba
Application Number:
JP2003086201A
Publication Date:
July 16, 2008
Filing Date:
March 26, 2003
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C07C309/65; G03F7/004; C07C309/67; C07D295/12; C09K3/00; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP2000281642A | ||||
| JP2000035665A | ||||
| JP9301948A | ||||
| JP9095479A |
Attorney, Agent or Firm:
Kiyoshi Kojima
Previous Patent: JPS4120436
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