Title:
研磨用組成物および研磨方法
Document Type and Number:
Japanese Patent JP5554052
Kind Code:
B2
Inventors:
Yamada Miyuki
Hiroshi Nitta
Hiroshi Nitta
Application Number:
JP2009269615A
Publication Date:
July 23, 2014
Filing Date:
November 27, 2009
Export Citation:
Assignee:
Admer Textile
Nitta Haas, Inc.
Nitta Haas, Inc.
International Classes:
C09K3/14; B24B37/00; H01L21/304
Attorney, Agent or Firm:
Morioka Right 往