Title:
A control device of a linear motion stage
Document Type and Number:
Japanese Patent JP6242215
Kind Code:
B2
Abstract:
The present invention relates to a control apparatus of a linear motion stage, which comprises: a first filter for filtering the frequency of a signal received from a linear encoder of the linear motion stage; an adder for adding an input signal representing a command position and a negative of an output signal of the first filter; a control for generating a control signal for controlling the linear motion stage based on an output signal of the adder; and a second filter for filtering the frequency of the control signal, wherein each of the input terminals of the first and second filters has a correction table for storing cut-off frequencies and damping rates measured according to the driven positions of the linear motion stage, thereby applying the correction table so as to determine the cut-off frequencies of the first and second filters and the damping rates according to the driven positions of the linear motion stage.
Inventors:
Ko Byung Kwon
Application Number:
JP2014005567A
Publication Date:
December 06, 2017
Filing Date:
January 16, 2014
Export Citation:
Assignee:
Sunghan Engineering Corporation
International Classes:
G05D3/12
Domestic Patent References:
| JP2005108162A | ||||
| JP2010004689A | ||||
| JP2006079535A | ||||
| JP2012028281A |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Kiyota Eisho
Blacksmith
Atsushi Shinohara
Kiyota Eisho