A control method of a substrate processing device and a substrate processing device, and a recording medium

Title:

A control method of a substrate processing device and a substrate processing device, and a recording medium

Document Type and Number:

Japanese Patent JP6268469

Kind Code:

B2

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Inventors:

Nobuhiro Konari
Hiroyuki Araki
Ogata Jin

Application Number:

JP2013261468A

Publication Date:

January 31, 2018

Filing Date:

December 18, 2013

Export Citation:

Assignee:

Screen Holdings Co., Ltd.

International Classes:

H01L21/306; H01L21/02; H01L21/304

Domestic Patent References:

Attorney, Agent or Firm:

Inaoka cultivation
Mio Kawasaki
Masahide Yasuda

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