A conveyance mechanism and a vacuum processor of a processed object

Title:

A conveyance mechanism and a vacuum processor of a processed object

Document Type and Number:

Japanese Patent JP6055229

Kind Code:

B2

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Inventors:

Tomohiro Hayasaka
Koji Takahashi
Taro Kiyokawa
Wataru Yahagi

Application Number:

JP2012177394A

Publication Date:

December 27, 2016

Filing Date:

August 09, 2012

Export Citation:

Assignee:

ULVAC, Inc.

International Classes:

H01L21/677; B65G13/02; B65G47/52; B65G49/06

Domestic Patent References:

Attorney, Agent or Firm:

Masatake Shiga
Shingo Suzuki

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