A conveying machine of a glass substrate, and a manufacturing method of a glass substrate

Title:

A conveying machine of a glass substrate, and a manufacturing method of a glass substrate

Document Type and Number:

Japanese Patent JP6026603

Kind Code:

B2

Inventors:

Ise

Application Number:

JP2015157709A

Publication Date:

November 16, 2016

Filing Date:

August 07, 2015

Export Citation:

Assignee:

avanstrate corporation

International Classes:

H01L21/677; B65G49/06; G01N21/958

Domestic Patent References:

Attorney, Agent or Firm:

Hidetada Kato
Takayuki Ishikawa

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