Title:
架橋性エラストマー組成物および該架橋性エラストマー組成物からなる成形品
Document Type and Number:
Japanese Patent JP4086070
Kind Code:
B2
Abstract:
There is provided a crosslinkable elastomer composition, which has small decrease in weight to all of high concentration F radical irradiation, O2 plasma treatment and fluorine plasma treatment which are conducted in a semiconductor manufacturing process and significant plasma resistance, and a molded article comprising the crosslinkable elastomer composition.
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Inventors:
Katsuhiko Higashino
Takeshi Noguchi
Takeshi Noguchi
Application Number:
JP2005507967A
Publication Date:
May 14, 2008
Filing Date:
January 07, 2004
Export Citation:
Assignee:
Daikin Industries, Ltd.
International Classes:
C08J7/00; C08K3/04; C08K3/16; C08L19/00; C08L27/12; C09K3/10; C08L77/10; C08L79/08; F16J15/10
Domestic Patent References:
| JP2002179737A |
Foreign References:
| WO2001016234A1 | ||||
| WO2002102892A1 |
Attorney, Agent or Firm:
Sota Asahina
Fumio Akiyama
Fumio Akiyama