Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2022120277
Kind Code:
A
Abstract:
To provide a cutting device capable of executing setting-up at a suitable timing according to the consumption amount of a cutting blade.SOLUTION: A cutting device cutting a workpiece, is equipped with a chuck table that has a holding surface holding the workpiece, a cutting unit that performs cutting with a cutting blade, a blade detection unit that detects a tip end of the cutting blade, and a control unit that executes setting-up for correcting a positional relationship of the workpiece and the butting blade, on the basis of a position of the tip end of the cutting blade detected by the blade detection unit. The control unit stores timing information that designates a timing when the setting-up is executed, and a reference value of consumption amount of the cutting blade. The control unit updates the timing information on the basis of a comparison result of the consumption amount of the cutting blade and the reference value.SELECTED DRAWING: Figure 1
Inventors:
KOJIMA MEGUMI
Application Number:
JP2021017073A
Publication Date:
August 18, 2022
Filing Date:
February 05, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B27/06; B24B47/22; B24B49/12; H01L21/301
Attorney, Agent or Firm:
Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
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