Title:
切削装置
Document Type and Number:
Japanese Patent JP7387408
Kind Code:
B2
Abstract:
A control unit of a cutting apparatus has a suction checking function of determining that foreign matter is clogged in a suction hole and issuing an instruction on removal of the foreign matter in a case where the value of a pressure gauge before mounting of a cutting blade onto a mount is less than a first predetermined value, and a mounting checking function of inhibiting start of rotation of a rotary shaft in a case where the value of the pressure gauge after mounting of the cutting blade onto the mount does not reach a second predetermined value smaller than the first predetermined value and permitting the start of rotation of the rotary shaft in a case where the value of the pressure gauge after mounting of the cutting blade onto the mount has reached the second predetermined value.
Inventors:
Hideji Nitta
Harunobu Yuzawa
Yoshio Matsushita
Harunobu Yuzawa
Yoshio Matsushita
Application Number:
JP2019214138A
Publication Date:
November 28, 2023
Filing Date:
November 27, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B23Q17/00; B24B45/00; B24B49/10; B28D1/24; B28D7/00; H01L21/301
Domestic Patent References:
| JP2015023139A | ||||
| JP2009255242A | ||||
| JP2009194326A | ||||
| JP2013188836A | ||||
| JP2018094682A | ||||
| JP2010140308A |
Foreign References:
| US20140341796 |
Attorney, Agent or Firm:
Atago Patent Attorneys Office
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
Sachiko Okunuki
Tsuyoshi Tsukano
Yoshifumi Kaneko
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