Title:
切削装置
Document Type and Number:
Japanese Patent JP7430451
Kind Code:
B2
Abstract:
A cutting apparatus includes a table including a support plate transparent in a visible region, a cutting unit, a first feeding mechanism that includes a first moving section for supporting the table and a first motor, a second feeding mechanism that includes a second moving section for supporting the cutting unit and a second motor, a first camera disposed on the side of a first surface of the support plate, a second camera disposed on the side of a second surface opposite to the first surface of the support plate, and a storage section that stores positional deviation amounts in the X-axis direction and the Y-axis direction between an imaging region at a reference position of the first camera and an imaging region at a reference position of the second camera.
Inventors:
Yoshimasa Kojima
Makoto Naka
Satoshi Hanashima
Makoto Naka
Satoshi Hanashima
Application Number:
JP2020066791A
Publication Date:
February 13, 2024
Filing Date:
April 02, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/12; B23Q17/24; B24B27/06; B28D1/24; H01L21/301; H01L21/68; H01L21/683
Domestic Patent References:
| JP2012256749A | ||||
| JP2010082644A |
Foreign References:
| US20190259645 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
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