Title:
A defect inspection device and a defect inspection method of a film
Document Type and Number:
Japanese Patent JP5944165
Kind Code:
B2
Inventors:
Katsuyuki Ueki
Kazuhisa Miyahara
Kazuhisa Miyahara
Application Number:
JP2011538755A
Publication Date:
July 05, 2016
Filing Date:
May 12, 2011
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
Digital Imaging Technology, Inc.
Digital Imaging Technology, Inc.
International Classes:
G01N21/892
Domestic Patent References:
JP2008008787A | 2008-01-17 | |||
JP2006047143A | 2006-02-16 | |||
JP2009025270A | 2009-02-05 | |||
JPH09136323A | 1997-05-27 |
Attorney, Agent or Firm:
Hiroaki Sakai