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Patent Searching and Data


Title:
A defect inspection device and a defect inspection method of a film
Document Type and Number:
Japanese Patent JP5944165
Kind Code:
B2
Inventors:
Katsuyuki Ueki
Kazuhisa Miyahara
Application Number:
JP2011538755A
Publication Date:
July 05, 2016
Filing Date:
May 12, 2011
Export Citation:
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Assignee:
TORAY INDUSTRIES,INC.
Digital Imaging Technology, Inc.
International Classes:
G01N21/892
Domestic Patent References:
JP2008008787A2008-01-17
JP2006047143A2006-02-16
JP2009025270A2009-02-05
JPH09136323A1997-05-27
Attorney, Agent or Firm:
Hiroaki Sakai