Title:
検出装置
Document Type and Number:
Japanese Patent JP7176676
Kind Code:
B2
Abstract:
To improve the noise resistance of a detection device.SOLUTION: A detection device includes a semiconductor substrate, a humidity detection unit 21 and a temperature detection unit 22 that are provided above the semiconductor substrate and output a signal according to a physical quantity, and a noise suppressing unit composed of a plurality of semiconductor layers stacked such that the polarities are alternately inverted in the semiconductor substrate 70 below the humidity detection unit. Further, a voltage that reversely biases each pn junction formed between the plurality of semiconductor layers is applied to the noise suppression unit. The noise suppression unit also includes a diffusion layer 106 formed on the surface layer of the semiconductor substrate. The diffusion layer functions as a resistor that generates heat when a current flows.SELECTED DRAWING: Figure 9
Inventors:
Taketoshi Nakane
Application Number:
JP2018215856A
Publication Date:
November 22, 2022
Filing Date:
November 16, 2018
Export Citation:
Assignee:
MinebeaMitsumi Co., Ltd.
International Classes:
H01L21/822; G01N27/04; G01N27/22; H01L21/3205; H01L21/768; H01L21/8222; H01L21/8234; H01L21/8248; H01L23/522; H01L27/04; H01L27/06
Domestic Patent References:
| JP2006234576A | ||||
| JP2012023143A | ||||
| JP2006012990A | ||||
| JP2007248065A | ||||
| JP2006084231A | ||||
| JP2008107183A | ||||
| JP8250657A | ||||
| JP2005536867A |
Foreign References:
| US20150047430 | ||||
| US20160003758 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito