Title:
荷電粒子ビームをブランクにするための装置
Document Type and Number:
Japanese Patent JP2008502101
Kind Code:
A
Abstract:
A beam blanking unit (1) comprises first and second blanking plates (2, 3) mounted to a support plate (15). A stopper (4) is mechanically and electrically connected to the first blanking plate (2).
Inventors:
Chan, Tao
Application Number:
JP2007514142A
Publication Date:
January 24, 2008
Filing Date:
May 13, 2005
Export Citation:
Assignee:
Nano Beam Limited
International Classes:
H01J37/09; G03F7/00; G03F7/20; G21K1/087; H01J9/14; H01J37/04; H01J37/147; H01J37/15; H01J37/305; H01L21/027
Attorney, Agent or Firm:
Shigeo Naruse