Title:
物体を洗浄するための装置
Document Type and Number:
Japanese Patent JP6475260
Kind Code:
B2
Abstract:
An apparatus for cleaning an object, the apparatus including: an object support for supporting the object; a low pressure chamber for exposing a first surface of the object to a low pressure when the object is arranged on the object support, an electrode arranged adjacent to and separated from the first surface of the object when the object is arranged on the object support, the electrode being in electrical communication with a surface of the object support which is adjacent the first surface of the object; and a power supply arranged to apply a voltage between the electrode and the object; thereby generating a discharge between the object and the electrode.
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Inventors:
Van der Wilk, Ronald
Goofis, Ger-Vim Jean
Goofis, Ger-Vim Jean
Application Number:
JP2016559391A
Publication Date:
February 27, 2019
Filing Date:
March 02, 2015
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; B08B7/00; B23H9/00; G03F1/22; H01L21/027; H01L21/304
Domestic Patent References:
| JP2013232670A | ||||
| JP2013084561A | ||||
| JP2011528165A | ||||
| JP2010174325A | ||||
| JP2000294620A | ||||
| JP2007115839A | ||||
| JP2003257949A | ||||
| JP11297595A | ||||
| JP9064021A |
Foreign References:
| US20110037960 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki