Title:
着脱自在の探針システムを備える装置および該装置を備える計測機器
Document Type and Number:
Japanese Patent JP4368822
Kind Code:
B2
Abstract:
The apparatus has a removable measurement probe (15) and a probe system (17). The probe can be deflected with several degrees of freedom, and the probe system generates signals which represent information about the deflection. The probe is connected to the probe system by the attractive force of a permanent magnet. A mechanical lever arrangement is provided. By moving the probe, the probe together with the system can be moved into change position. In this position, the lever arrangement separates the permanent magnet spatially from the probe and the attractive force between the probe and the probe system is reduced. An independent claim is included for a measuring device comprising the above system.
Inventors:
Georg Mies
Application Number:
JP2005124606A
Publication Date:
November 18, 2009
Filing Date:
April 22, 2005
Export Citation:
Assignee:
Klingelnberg GmbH
International Classes:
G01B5/016; G01B5/20; G01B5/008; G01B5/012; G01B5/28; G01B7/012; G01B21/00; G01B21/04
Domestic Patent References:
| JP11505622A | ||||
| JP9131604A | ||||
| JP2502488A | ||||
| JP2502578A | ||||
| JP2226010A | ||||
| JP6501776A | ||||
| JP8043066A | ||||
| JP9507918A | ||||
| JP11123635A | ||||
| JP2005521869A | ||||
| JP1505622A | ||||
| JP63029202A | ||||
| JP2069612A | ||||
| JP5149737A | ||||
| JP2004516480A | ||||
| JP2004174678A |
Foreign References:
| US6131300 |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Masahiro Ishino
Mitsuo Tanaka
Masahiro Ishino