Title:
A device including nano structure and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6158798
Kind Code:
B2
Abstract:
A method for manufacturing of a device (300, 410-412) comprising a first substrate (201) comprising a plurality of sets of nanostructures (207) arranged on the first substrate, wherein each of the sets of nanostructures is individually electrically controllable, the method comprising the steps of: providing (101) a first substrate (201) having a first (202) and a second (203) face, wherein the substrate comprises an insulating material; providing (102) a plurality of stacks (204) on the first substrate, the stacks being spaced apart from each other, wherein each stack comprises a first layer (205) comprising a first material and a second layer (206) comprising a second material different from the first material, the second layer being arranged on the first layer, and wherein the second material catalyses the formation of nanostructures thereon; heating (103) the first substrate having the plurality of stacks arranged thereon in an atmosphere such that nanostructures are formed on the second layer and such that the first material diffuses or mixes into the first substrate and/or reacts with the insulating material to form an electrical portion (208) within the first substrate below each of the stacks, wherein the electrical portion is electrically conductive and/or semi-conductive and comprises a mixture of the first material and the insulating material and/or reaction adducts thereof, each of the electrical portions thereby allowing for individual electrical control of a respective one of the set of nanostructures.
Inventors:
Wakas Calid
Application Number:
JP2014517742A
Publication Date:
July 05, 2017
Filing Date:
June 29, 2012
Export Citation:
Assignee:
Wakas Calid
International Classes:
H01J9/02; B82Y40/00; H01J1/304
Domestic Patent References:
| JP2001162600A | ||||
| JP2008538854A | ||||
| JP5067426A | ||||
| JP63216233A | ||||
| JP2005324325A | ||||
| JP2006255817A | ||||
| JP2011517366A | ||||
| JP2008546146A |
Foreign References:
| US20090169464 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Masatoshi Takahashi
Satoshi Deno
Naori Kota
Naohisa Akashi
Takashi Ishida
Tetsuji Koga
Masatoshi Takahashi
Satoshi Deno
Naori Kota
Naohisa Akashi