Title:
A device and a method for UV processing, a chemical treatment, and deposition
Document Type and Number:
Japanese Patent JP5976776
Kind Code:
B2
Abstract:
Embodiments of the present invention provide apparatus and methods for performing UV treatment and chemical treatment and/or deposition in the same chamber. One embodiment of the present invention provides a processing chamber including a UV transparent gas distribution showerhead disposed above a substrate support located in an inner volume of the processing chamber, a UV transparent window disposed above the UV transparent gas distribution showerhead, and a UV unit disposed outside the inner volume. The UV unit is configured to direct UV lights towards the substrate support through the UV transparent window and the UV transparent gas distribution showerhead.
Inventors:
Bangsal, Amit
DuBois, Dale Earl.
Rocha-Alvarez, Juan Carlos
Barja, Sanjeev
Hendrickson, Scott A.
Novak, thomas
DuBois, Dale Earl.
Rocha-Alvarez, Juan Carlos
Barja, Sanjeev
Hendrickson, Scott A.
Novak, thomas
Application Number:
JP2014503984A
Publication Date:
August 24, 2016
Filing Date:
April 05, 2012
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/31; H01L21/316; H01L21/768; H01L23/532
Domestic Patent References:
| JP6093454A | ||||
| JP2008075179A | ||||
| JP4505347A | ||||
| JP10154705A | ||||
| JP2010103151A | ||||
| JP10079380A | ||||
| JP10121252A | ||||
| JP2001332465A | ||||
| JP2003045862A | ||||
| JP10199874A | ||||
| JP2007318141A | ||||
| JP2005209771A | ||||
| JP2009272595A |
Foreign References:
| US20110076401 | ||||
| WO2009137272A2 |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori