Title:
DIAGNOSTIC METHOD AND DIAGNOSTIC DEVICE OF ULTRAFILTRATION MEMBRANE AND PRODUCTION SYSTEM OF ULTRAPURE WATER
Document Type and Number:
Japanese Patent JP2016083646
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a diagnostic method and a diagnostic device of an ultrafiltration membrane capable of simply and rapidly diagnosing the deterioration or breaking of a UF equipped in a UF module while maintaining stable water quality without stopping an ultrapure water apparatus and to provide a production system of ultrapure water capable of stably producing high-purity ultrapure water.SOLUTION: A diagnostic method of an ultrafiltration membrane comprising: a step filtering the permeated water or concentrated water of the ultrafiltration membrane by a filtration membrane capable of capturing coarse particles having a maximum diameter of more than 0.4 μm and 10 μm or less in the permeated water or concentrated water of the ultrafiltration membrane producing ultrapure water; and a step measuring the number of the coarse particles on the filtration membrane, and a diagnostic device of the ultrafiltration membrane are provided.SELECTED DRAWING: Figure 1
Inventors:
TANJI TERU
ITO KAORU
ITO KAORU
Application Number:
JP2014220185A
Publication Date:
May 19, 2016
Filing Date:
October 29, 2014
Export Citation:
Assignee:
NOMURA MICRO SCIENCE KK
International Classes:
B01D65/10; B01D61/18; B01D69/06; C02F1/44; G01N15/06
Domestic Patent References:
| JP2011247675A | 2011-12-08 | |||
| JPH08252440A | 1996-10-01 | |||
| JP2005185944A | 2005-07-14 | |||
| JP2014000548A | 2014-01-09 | |||
| JP2007256011A | 2007-10-04 | |||
| JP2005010057A | 2005-01-13 | |||
| JPH0615271A | 1994-01-25 |
Foreign References:
| WO2009122884A1 | 2009-10-08 |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office