Title:
DICING APPARATUS, BLADE DIAGNOSIS APPARATUS, BLADE DIAGNOSIS METHOD AND PROGRAM
Document Type and Number:
Japanese Patent JP2017164843
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a dicing apparatus, a blade diagnosis apparatus, a blade diagnosis method and a program that calculate a tip shape of a blade for diagnosis of the blade.SOLUTION: A blade diagnosis method comprises: a groove formation step for rotating a disk-shaped blade and bringing a tip of the blade into contact with a flat plate work so as to form a groove in the work; an image obtaining step for obtaining a plan view image of the formed groove; a measurement step for measuring a size of the groove from the obtained image; a calculation step for calculating a tip shape of the blade from the measured size; and an output step for outputting information relating to the calculated tip shape.SELECTED DRAWING: Figure 4
Inventors:
KINJO YUSUKE
Application Number:
JP2016051840A
Publication Date:
September 21, 2017
Filing Date:
March 16, 2016
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B49/12; B24B27/06; H01L21/301
Domestic Patent References:
| JP2010240776A | 2010-10-28 |
Attorney, Agent or Firm:
Kenzo Matsuura
Previous Patent: JP2017164842
Next Patent: A cutting machine and a grinder which are used for a waterproofing structure layer removing method o...
Next Patent: A cutting machine and a grinder which are used for a waterproofing structure layer removing method o...