Title:
A discharge lamp and an exposure method
Document Type and Number:
Japanese Patent JP6225315
Kind Code:
B2
Abstract:
A light source apparatus wherein it is possible, for example, to mount a discharge lamp to a mounting mechanism easily in a short amount of time, is provided. A light source apparatus is equipped with a discharge lamp (1), which has a glass tube (25) that forms a light emitting part and a base member (26) that is coupled thereto, and a mounting apparatus (31) that holds the discharge lamp (1) via the base member (26). Therein, the base member (26) has a flange part (26a) that contacts positioning plate (50) of the mounting apparatus (31), and a fixed part (26h) that is urged with a pressing force that presses the flange part (26a) to the positioning plate (50). Furthermore, the mounting apparatus (31) has a fixing arm (5 5A) that urges the fixed part (26h) by a compression coil spring (44A).
Inventors:
White number Hiro
Yasuo Aoki
Motoo Koyama
Takayuki Kikuchi
Yasuo Aoki
Motoo Koyama
Takayuki Kikuchi
Application Number:
JP2017057612A
Publication Date:
November 08, 2017
Filing Date:
March 23, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01J5/50; H01J7/24; H01J61/52; F21Y101/00
Domestic Patent References:
| JP60154435A | ||||
| JP2002541630A | ||||
| JP58075704A |
Foreign References:
| US6591701 |
Attorney, Agent or Firm:
Fuyuki Nagai
Takao Watanabe
Takao Watanabe