Title:
放電ランプ、光源装置及び露光装置
Document Type and Number:
Japanese Patent JP5605666
Kind Code:
B2
Abstract:
A light source device having a large cooling action on the base member of a discharge lamp. A connector (41) on the sides of the power supply (32) and the air blower (34) and the base-side connector (52) of a discharge lamp (1) are connected to each other through a connection cable (57) having a power cable (33A) in which an air blow pipe (35A) is contained. An electric power is supplied from the power supply (32) to a base part (28) through the power cable (33A) of the connection cable (57), the base-side connector (52) and a flow passage bending member (51). The cool air from the air blower (34) is supplied to the groove part (28b) of the base part (28) through the air blow pipe (35A) of the connection cable (57), the base-side connector (52) and an air blow passage in the flow passage-bending member (51).
Inventors:
Takayuki Kikuchi
Kitano 博
Kitano 博
Application Number:
JP2013154630A
Publication Date:
October 15, 2014
Filing Date:
July 25, 2013
Export Citation:
Assignee:
NIKON CORP.
International Classes:
H01J5/50; G03F7/20; H01L21/027; F21Y101/00
Attorney, Agent or Firm:
Omori 聡