Title:
A discharge lamp, light equipment, an exposure device, and a device manufacturing method
Document Type and Number:
Japanese Patent JP6036952
Kind Code:
B2
Abstract:
A light source apparatus wherein it is possible, for example, to mount a discharge lamp to a mounting mechanism easily in a short amount of time, is provided. A light source apparatus is equipped with a discharge lamp (1), which has a glass tube (25) that forms a light emitting part and a base member (26) that is coupled thereto, and a mounting apparatus (31) that holds the discharge lamp (1) via the base member (26). Therein, the base member (26) has a flange part (26a) that contacts positioning plate (50) of the mounting apparatus (31), and a fixed part (26h) that is urged with a pressing force that presses the flange part (26a) to the positioning plate (50). Furthermore, the mounting apparatus (31) has a fixing arm (5 5A) that urges the fixed part (26h) by a compression coil spring (44A).
Inventors:
White number Hiro
Yasuo Aoki
Motoo Koyama
Takayuki Kikuchi
Yasuo Aoki
Motoo Koyama
Takayuki Kikuchi
Application Number:
JP2015193039A
Publication Date:
November 30, 2016
Filing Date:
September 30, 2015
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01J5/56; H01J5/60; H01J7/26; F21Y101/00
Domestic Patent References:
| JP2001216938A | ||||
| JP5038752U |
Attorney, Agent or Firm:
Satoshi Omori