Title:
The disposal method, the layered product, temporary fastening material, a constituent for temporary fastening, and a semiconductor device of a substrate
Document Type and Number:
Japanese Patent JP6103817
Kind Code:
B2
Inventors:
Hirofumi Goto
Seiichiro Takahashi
Eiji Takano
Mie Matsuo
Naoko Yamaguchi
Seiichiro Takahashi
Eiji Takano
Mie Matsuo
Naoko Yamaguchi
Application Number:
JP2012094025A
Publication Date:
March 29, 2017
Filing Date:
April 17, 2012
Export Citation:
Assignee:
JSR CORPORATION
Toshiba Corporation
Toshiba Corporation
International Classes:
H01L21/683
Domestic Patent References:
| JP2003037155A | ||||
| JP2003086550A | ||||
| JP3918556B2 | ||||
| JP2011171712A | ||||
| JP2011023507A | ||||
| JP2006049482A | ||||
| JP8222535A | ||||
| JP2003306653A |
Foreign References:
| WO2010143510A1 |
Attorney, Agent or Firm:
Patent corporation ssinpat