A disposal method of a substrate - Tokyo Ohka Kogyo Co., Ltd.

Title:

A disposal method of a substrate

Document Type and Number:

Japanese Patent JP6055354

Kind Code:

B2

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Inventors:

Atsushi Matsushita
Tatsuhiro Mitake

Application Number:

JP2013070435A

Publication Date:

December 27, 2016

Filing Date:

March 28, 2013

Export Citation:

Assignee:

Tokyo Ohka Kogyo Co., Ltd.

International Classes:

H01L21/3065

Domestic Patent References:

Attorney, Agent or Firm:

Harakenzo world patent & trademark

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