Title:
A drawing device and a drawing method
Document Type and Number:
Japanese Patent JP5934546
Kind Code:
B2
Inventors:
Tomohiko Miyagi
Fumiharu Shibata
Fumiharu Shibata
Application Number:
JP2012076139A
Publication Date:
June 15, 2016
Filing Date:
March 29, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
G03F7/20; G01B11/00; G01B11/30; G01N21/956
Domestic Patent References:
| JP2009075327A | ||||
| JP2006300676A | ||||
| JP2002168793A | ||||
| JP2010080712A |
Foreign References:
| WO2011080310A1 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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