Title:
エレクトレット素子、当該エレクトレット素子を搭載したマイクロフォン、及び、当該エレクトレット素子の製造方法
Document Type and Number:
Japanese Patent JP6554742
Kind Code:
B2
Abstract:
An electret element includes: an electret film that contains silicon oxide; and a protective film formed over the electret film and constituted of aluminum oxide deposited through an atomic layer deposition method.
Inventors:
Hashiguchi Hara
Nishimori Yuki
Shinichi Arioka
Masato Suzuki
Ishibashi Kazunori
Nishimori Yuki
Shinichi Arioka
Masato Suzuki
Ishibashi Kazunori
Application Number:
JP2014215229A
Publication Date:
August 07, 2019
Filing Date:
October 22, 2014
Export Citation:
Assignee:
National University Corporation Shizuoka University
Saginomiya Co., Ltd.
Saginomiya Co., Ltd.
International Classes:
H04R19/01; H01G7/02
Domestic Patent References:
| JP2009164539A | ||||
| JP2013235978A | ||||
| JP2014050196A | ||||
| JP2013013256A |
Attorney, Agent or Firm:
Fuyuki Nagai