Title:
An electric capacity type pressure sensor and an input device
Document Type and Number:
Japanese Patent JP5974938
Kind Code:
B2
Abstract:
A dielectric material layer (33) is formed on the upper surface of a fixed electrode (32). A recess (33a) is formed in the upper surface of the dielectric material layer (33) by having the upper surface of the dielectric material layer (33) recessed downward. The bottom surface of the recess (33a) is covered with the dielectric material layer (33). An upper substrate (35a) is laminated on the surface of the dielectric material layer (33) so as to cover the recess (33a). A thin-film-like conductive diaphragm (35) is formed of an upper substrate (35a) portion, i.e., a region positioned above the recess (33a). A protrusion (39) is provided at an upper surface center portion of the diaphragm (35).
Inventors:
Katsuyuki Inoue
Toshiaki Okuno
Toshiaki Okuno
Application Number:
JP2013046661A
Publication Date:
August 23, 2016
Filing Date:
March 08, 2013
Export Citation:
Assignee:
OMRON Corporation
International Classes:
G01L1/14; G01L5/00; G06F3/044; H01L29/84
Domestic Patent References:
| JP2003139628A |
Attorney, Agent or Firm:
Masafusa Nakano