Title:
An electric capacity type sensor and a correcting method of a nonlinear output
Document Type and Number:
Japanese Patent JP6020711
Kind Code:
B2
Abstract:
An electrostatic capacitance sensor (10) includes a movable electrode (110), a support (120), a beam member (130), fixed electrodes (141) an (180), a detection unit (200), and a correction unit (300). The beam member (130) functions as a spring, by which the movable electrode (110) is fixed to the support (120) in a movable state. The detection unit (200) detects a change in capacitance charged between the movable electrode (110) and the fixed electrodes (141) and (180). The correction unit (300) corrects a detection result of the detection unit (200) and generates an acceleration signal that indicates acceleration.
Inventors:
Kakinuma Minoru
Masami Kishiro
Masami Kishiro
Application Number:
JP2015510094A
Publication Date:
November 02, 2016
Filing Date:
April 01, 2014
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
G01P21/00; G01P15/08; G01P15/125; G01P15/18
Domestic Patent References:
| JPH0954114A | 1997-02-25 | |||
| JP2002022760A | 2002-01-23 | |||
| JPH08313552A | 1996-11-29 | |||
| JP2009020094A | 2009-01-29 | |||
| JP2007198789A | 2007-08-09 |
Foreign References:
| WO2001096815A1 | 2001-12-20 |
Attorney, Agent or Firm:
Shinji Hayami