Title:
電気−機械変換素子とその製造方法、及び電気−機械変換素子を有する液滴吐出ヘッド、液滴吐出ヘッドを有する液滴吐出装置
Document Type and Number:
Japanese Patent JP5724168
Kind Code:
B2
Abstract:
An electro-mechanical transducer includes a plurality of independent elements. Each of the plurality of independent elements includes one of a substrate and a foundation film, a first electrode of oxide disposed on the one of the substrate and the foundation film, an electro-mechanical transducer film disposed on the first electrode, a second electrode of oxide disposed on the electro-mechanical transducer film, and a third electrode of metal formed on the first electrode as a common electrode conductive to the first electrode and common to at least two of the plurality of independent elements.
Inventors:
Satoshi Mizukami
Application Number:
JP2009242170A
Publication Date:
May 27, 2015
Filing Date:
October 21, 2009
Export Citation:
Assignee:
株式会社リコー
International Classes:
H01L41/047; B05C5/00; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/23; H01L41/29; H01L41/331
Domestic Patent References:
| JP2006087285A | ||||
| JP2008155461A | ||||
| JP2007281028A | ||||
| JP2009226796A | ||||
| JP2006217721A | ||||
| JP2007048816A | ||||
| JP2008005464A | ||||
| JP2005135975A | ||||
| JP2007088442A |
Attorney, Agent or Firm:
Chieko Tateno