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Title:
The electron gun which was constituted for electron microscope methods and which is emitted under the high voltage
Document Type and Number:
Japanese Patent JP6038794
Kind Code:
B2
Abstract:
A field-emission electron gun including an electron emission tip, an extractor anode, and a mechanism creating an electric-potential difference between the emission tip and the extractor anode. The emission tip includes a metal tip and an end cone produced by chemical vapor deposition on a nanofilament, the cone being aligned and welded onto the metal tip. The electron gun can be used for a transmission electron microscope.

Inventors:
Marc Montio
Florent Houdrière
Application Number:
JP2013528751A
Publication Date:
December 07, 2016
Filing Date:
September 16, 2011
Export Citation:
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Assignee:
Ecole Polytechnique/Dgar
International Classes:
H01J37/073; H01J1/304; H01J9/02
Domestic Patent References:
JP2007055856A
JP2009146705A
JP2006294481A
JP2007242253A
JP2003206116A
Attorney, Agent or Firm:
Atsushi Aoki
Tetsuro Shimada
Shinji Mitsuhashi
Hirose Shigeki
Kazuo Maejima
Masahiro Tahara