Title:
The electron microscope which uses an electron detector and it including closely united 1 or a plurality of union objects of a scintillator photo-multiplier
Document Type and Number:
Japanese Patent JP6215202
Kind Code:
B2
Abstract:
An electron detector includes a plurality of assemblies, the plurality of assemblies including a first assembly having a first SiPM and a first scintillator made of a first scintillator material directly connected to an active light sensing surface of the first SiPM, and a second assembly having a second SiPM and a second scintillator made of a second scintillator material directly connected to an active light sensing surface of the second SiPM, wherein the first scintillator material and the second scintillator material are different than one another. Alternatively, an electron detector includes an assembly including an SiPM and a scintillator member having a front surface and a back surface, the scintillator member being a film of a scintillator material directly deposited on to an active light sensing surface of the SiPM.
Inventors:
Barbie, Nicholas Sea.
Mott, Richard Bee.
Mott, Richard Bee.
Application Number:
JP2014524098A
Publication Date:
October 18, 2017
Filing Date:
August 03, 2012
Export Citation:
Assignee:
PULSETOR,LLC
International Classes:
H01J37/244; G01N23/225; G01T1/20; H01J37/22; H01J37/26; H01J37/28
Domestic Patent References:
| JP2009099468A | ||||
| JP8036985A | ||||
| JP2009043594A | ||||
| JP2010500119A | ||||
| JP2009511104A |
Foreign References:
| WO2011089955A1 | ||||
| WO2011048061A1 |
Attorney, Agent or Firm:
Maruyama International Patent Office