Title:
電子顕微鏡
Document Type and Number:
Japanese Patent JP4365721
Kind Code:
B2
Abstract:
There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens (12) located immediately behind the objective lens (11) demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens (13). This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses (13,14,15) create a crossover image and a microscope image in the entrance window plane (24) and entrance image plane (25), respectively, of an energy filter (16). The energy filter focuses the microscope image and crossover image onto the exit image plane (26) and exit window plane (27), respectively. The output image from the filter is projected onto the final image plane (20) by first and second projector lenses (18,19).
Inventors:
Toshikatsu Kanayama
Application Number:
JP2004114513A
Publication Date:
November 18, 2009
Filing Date:
April 08, 2004
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/26; H01J37/05; H01J37/153; H01J47/00
Domestic Patent References:
| JP2001291486A | ||||
| JP61049363A | ||||
| JP59031548A | ||||
| JP2001006601A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu