Title:
Membrane forming device and film forming method
Document Type and Number:
Japanese Patent JP6333083
Kind Code:
B2
Inventors:
Yuji Okamoto
Makoto Jiro
Makoto Jiro
Application Number:
JP2014128974A
Publication Date:
May 30, 2018
Filing Date:
June 24, 2014
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
B05C5/00; B05C11/10; B05D1/26
Domestic Patent References:
| JP2014030807A | ||||
| JP2014091076A | ||||
| JP2006076130A | ||||
| JP10006531A | ||||
| JP2011235249A |
Attorney, Agent or Firm:
Mikio Kuruyama