Title:
A formation method of a carbon system coat, and a forming device
Document Type and Number:
Japanese Patent JP6103644
Kind Code:
B2
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Inventors:
Naoto Hayashi
Tatsuya Oki
Tatsuya Oki
Application Number:
JP2013200739A
Publication Date:
March 29, 2017
Filing Date:
September 27, 2013
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
C23C26/00
Domestic Patent References:
| JP2013040400A | ||||
| JP2011511151A |
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