Title:
ガスバリアフィルム及びその製造方法、並びに該ガスバリアフィルムを用いた、有機EL素子用樹脂基材、有機EL素子
Document Type and Number:
Japanese Patent JP4946860
Kind Code:
B2
Abstract:
A gas barrier film comprising a resin substrate provided thereon at least one layer of a ceramic film, wherein the density ratio Y (= Áf / Áb) satisfies 1 ¥ Y ¥ 0.95 and the ceramic film has a residual stress being a compression stress of 0.01 MPa or more and 100 Mpa or less, wherein Áf is the density of the ceramic film and Áb is the density of a comparative ceramic film being formed by thermal oxidation or thermal nitridation of a metal as a mother material of the ceramic film so as to being the same composition ratio of the ceramic film.
Inventors:
Kazuhiro Fukuda
Hirota Arita
Mamiya Shuo
Hirota Arita
Mamiya Shuo
Application Number:
JP2007503620A
Publication Date:
June 06, 2012
Filing Date:
February 07, 2006
Export Citation:
Assignee:
Konica Minolta Holdings Co., Ltd.
International Classes:
B32B18/00; B32B9/00; C08J7/06; C23C16/42; C23C16/505; H01L51/50; H05B33/10
Domestic Patent References:
| JP2004084027A | 2004-03-18 | |||
| JPS61297134A | 1986-12-27 | |||
| JP2004068143A | 2004-03-04 |
Attorney, Agent or Firm:
Isono Dozo
Yasuo Nara
Naoki Ito
Yasuo Nara
Naoki Ito