マイクロ波加熱処理装置および処理方法 - 東京エレクトロン株式会社

Title:

マイクロ波加熱処理装置および処理方法

Document Type and Number:

Japanese Patent JP5657059

Kind Code:

B2

Abstract:

A microwave heating apparatus includes a phase control unit configured to change a phase of a standing wave of microwave introduced into the process chamber by the microwave introduction unit. The phase control unit includes a recessed portion with respect to an inner surface of the bottom wall. The phase control unit is formed of a bottom portion and a fixing plate installed at a lower surface of the bottom portion from the outer side of the process chamber. The phase of the standing wave in the process chamber is changed by the incidence and reflection of the microwave in the recessed portion of the phase control unit surrounded by metallic wall.

More Like This: