Title:
熱処理装置
Document Type and Number:
Japanese Patent JP7433936
Kind Code:
B2
Abstract:
To provide a thermal treatment device including a lamp house capable of being moved easily and safely.SOLUTION: In the case of maintenance of a chamber 6, two air cylinders 30 raise a piston 31 to lift a flash lamp house 5 having a flash lamp built-in. The flash lamp house 5 supported by the air cylinders 30 is horizontally moved to a maintenance position along a slide rail 90 and a top of the chamber 6 is opened. After maintenance work for the chamber 6 is finished, the flash lamp house 5 supported by the air cylinders 30 is horizontally moved again to a treatment position above the chamber 6 along the slide rail 90. The air cylinders 30 lower the piston 31 to mount the flash lamp house 5 on the top of the chamber 6. At this time, height positions of four corners of the flash lamp house 5 are measured by dial gauges 58.SELECTED DRAWING: Figure 9
Inventors:
Kazuya Mori
Jun Watanabe
Naoto Mori
Jun Watanabe
Naoto Mori
Application Number:
JP2020014465A
Publication Date:
February 20, 2024
Filing Date:
January 31, 2020
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/26
Domestic Patent References:
| JP2004047746A | ||||
| JP2007266368A | ||||
| JP2000005944A | ||||
| JP59061530U | ||||
| JP2007150108A | ||||
| JP2000349079A | ||||
| JP2013033946A |
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita