Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
バッチ式熱処理装置及び該装置に適用されるヒータ
Document Type and Number:
Japanese Patent JP2011528501
Kind Code:
A
Inventors:
Ho, Kwangsan
Kang, Hoyoung
Application Number:
JP2011518650A
Publication Date:
November 17, 2011
Filing Date:
July 16, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TERASEMICON CORPORATION
International Classes:
H01L21/324; F27B17/00; F27D7/02; F27D9/00; F27D11/02; H01L31/04; H05B3/10; H05B3/42; C22C38/00; C22C38/30
Domestic Patent References:
JP2004179672A2004-06-24
JP2002175868A2002-06-21
JP2006286222A2006-10-19
JP2000012471A2000-01-14
JP2002221394A2002-08-09
JP2003194478A2003-07-09
JP2006112762A2006-04-27
JP2003123651A2003-04-25
Foreign References:
WO2006022232A12006-03-02
Attorney, Agent or Firm:
Yoichi Oshima



 
Previous Patent: 垂直構造半導体発光素子製造用支持基板及びこれを用いた垂直構造半導体...

Next Patent: 高密度構造体の形成方法