Title:
A high frequency electric power unit and a matching method for the same
Document Type and Number:
Japanese Patent JP6045118
Kind Code:
B2
Abstract:
Provided is a high frequency power source device, and matching method therefor, in which the constant of a matching unit and the oscillating frequency of a frequency oscillator are variable, wherein the following are carried out simultaneously: frequency control in which a matching state value indicating the matching state between the high frequency power source and a load which is the destination of the supplied power is detected, and the oscillating frequency of the frequency oscillator is controlled on the basis of the matching state value; and matching unit control in which the constant of the matching unit is controlled on the basis of the matching state value. The oscillation frequency is continually updated by frequency control, even while the constant is being updated by matching unit control.
Inventors:
Naoya Fujimoto
Noriichi Kato
Kenichi Seki
Naoto Takahashi
Noriichi Kato
Kenichi Seki
Naoto Takahashi
Application Number:
JP2014503319A
Publication Date:
December 14, 2016
Filing Date:
March 06, 2012
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H05H1/46; C23C16/505; H01L21/205; H01L21/3065; H03H7/40
Domestic Patent References:
| JP2011217482A | ||||
| JP2011519115A | ||||
| JP2008181846A | ||||
| JP11087097A | ||||
| JP2008130398A | ||||
| JP6243992A | ||||
| JP2007336148A |
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