Title:
An imprint device, a manufacturing method of the article using it
Document Type and Number:
Japanese Patent JP5995567
Kind Code:
B2
Inventors:
Keiji Yamashita
Keita Sakai
Torii Hirotoshi
Keita Sakai
Torii Hirotoshi
Application Number:
JP2012156145A
Publication Date:
September 21, 2016
Filing Date:
July 12, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2010098310A | ||||
| JP2008288324A | ||||
| JP2007036289A | ||||
| JP2011520016A | ||||
| JP2004043465A | ||||
| JP2009223998A | ||||
| JP2010087533A | ||||
| JP2010530636A | ||||
| JP2012023092A | ||||
| JP2012060079A | ||||
| JP2008258389A | ||||
| JP2000243822A | ||||
| JP8046017A |
Foreign References:
| WO2012019874A1 |
Attorney, Agent or Firm:
Ryoichi Takaoka