Title:
An inspection device and an inspection method
Document Type and Number:
Japanese Patent JP6037386
Kind Code:
B2
Abstract:
Provided are an inspection device and an inspection method capable of achieving improved magnetic field sensitivity by using a magnetic thin film of a small film thickness. A light-emitting unit 1 emits light of a first wavelength for acquiring magnetic field inspection information and a second wavelength for acquiring inspection object surface information. A selection unit 6 selects information from an inspection object 4 and information from a magnetophotonic crystal film 3 acquired by light irradiation performed by an irradiation unit 2. An image generation unit 9 generates image data based on the magnetic field inspection information acquired with the first wavelength and the inspection object surface information acquired with the second wavelength selected by the selection unit. Each of the generated image data is displayed on a display unit 10.
Inventors:
Hisashi Endo
Masashi Narushige
Mitsuteru Inoue
Hiroyuki Takagi
Masashi Narushige
Mitsuteru Inoue
Hiroyuki Takagi
Application Number:
JP2013025703A
Publication Date:
December 07, 2016
Filing Date:
February 13, 2013
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N27/83; G01N21/88
Domestic Patent References:
| JP6273349A | ||||
| JP6118060A | ||||
| JP62110139A | ||||
| JP2013544352A | ||||
| JP2002311403A | ||||
| JP2011163972A |
Other References:
橋本良介他,多結晶鉄ガーネットスパッタ膜を用いた磁気光学イメージングの基礎検討,電気学会マグネティックス研究会資料,2012年 9月24日,MAG-12, 81-101,39-42
Attorney, Agent or Firm:
Kaichi International Patent Office
Kasuga Toshiaki
Inoki Yuichi
Kasuga Toshiaki
Inoki Yuichi
Previous Patent: A fuel composition system and an operating method for the same
Next Patent: JPS6037387
Next Patent: JPS6037387