Title:
弾性体の検査方法、検査装置、及び寸法予測プログラム
Document Type and Number:
Japanese Patent JP4885714
Kind Code:
B2
Abstract:
In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoelectric/ electrostrictive actuator, and the amount of displacement of the piezoelectric/electrostrictive actuator is predicted by the frequency response characteristics. The piezoelectric/ electrostrictive actuator is precisely inspected without dissolution and destruction and without actual driving as a product.
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Inventors:
Tomohiro Yamada
Masato Komazawa
Tetsuya Hatta
Takahito Nehagi
Masato Komazawa
Tetsuya Hatta
Takahito Nehagi
Application Number:
JP2006512654A
Publication Date:
February 29, 2012
Filing Date:
April 27, 2005
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L41/09; G01B7/16; G01H11/08; G01H13/00; G01N29/04; G01N29/12; G01N29/42; H01H57/00; H01L41/08; H01L41/22
Domestic Patent References:
| JPH1065231A | 1998-03-06 | |||
| JPH11168246A | 1999-06-22 | |||
| JP2002005664A | 2002-01-09 |
Foreign References:
| WO2004032320A1 | 2004-04-15 |
Attorney, Agent or Firm:
Ippei Watanabe