Title:
An ion filter and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6027583
Kind Code:
B2
Abstract:
An ion filter used for an electron multiplier is provided. The ion filter has an insulating substrate (11), a first conductive layer (12) formed on one main surface of the insulating substrate (11), a second conductive layer (13) formed on the other main surface of the insulating substrate (11), and a plurality of through-holes (30) formed along the thickness direction of the insulating substrate (11). The ion filter is configured such that a first thickness (th1) of the first conductive layer (12) is different from a second thickness (th2) of the second conductive layer (13).
Inventors:
Daisuke Arai
Application Number:
JP2014189317A
Publication Date:
November 16, 2016
Filing Date:
September 17, 2014
Export Citation:
Assignee:
Fujikura Ltd.
International Classes:
H01J47/06; G01T1/18; H01J1/46; H01J9/02
Domestic Patent References:
| JP2012185025A | ||||
| JP2005010163A | ||||
| JP2010067613A | ||||
| JP2001508935A |
Attorney, Agent or Firm:
Eternal patent business corporation
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