イオン化装置 - SHIMADZU CORPORATION

Title:

イオン化装置

Document Type and Number:

Japanese Patent JP7147990

Kind Code:

B2

Abstract:

An ionization device including: a laser light source; a light collection optical system configured to irradiate a sample with the laser light; a first intensity changing unit configured to continuously change an intensity of laser light; a second intensity changing unit configured to stepwisely change an intensity of laser light; an irradiation diameter setting reception unit configured to receive setting of an irradiation diameter of laser light; an irradiation intensity setting reception unit configured to receive setting of an irradiation intensity of laser light; and a laser light intensity controller configured to set an intensity of the laser light by changing an irradiation diameter of the laser light by the light collection optical system and controlling the second intensity changing unit according to the irradiation diameter, and by controlling the first intensity changing unit according to the irradiation intensity.

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Inventors:

Takahiro Harada

Application Number:

JP2021536496A

Publication Date:

October 05, 2022

Filing Date:

July 29, 2019

Export Citation:

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Assignee:

SHIMADZU CORPORATION

International Classes:

H01J49/16; G01N27/62; H01J27/24; H01J37/08

Domestic Patent References:

JP10153579A
JP2007257851A
JP2008525956A

Foreign References:

KR1020170120924A

Attorney, Agent or Firm:

Kyoto International Patent Office

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