A joining apparatus, a junction system, a joining method, a program, and a computer storage

Title:

A joining apparatus, a junction system, a joining method, a program, and a computer storage

Document Type and Number:

Japanese Patent JP5905509

Kind Code:

B2

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Inventors:

Shinji Okada
Masatoshi Shiraishi
Masatoshi Deguchi
Naoto Yoshitaka
Sugihara Shintaro
Masataka Matsunaga

Application Number:

JP2014100221A

Publication Date:

April 20, 2016

Filing Date:

May 14, 2014

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/02; H01L21/677

Domestic Patent References:

Foreign References:

WO2011090905A1

Attorney, Agent or Firm:

Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Naoki Ogita

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