Title:
圧電性材料基板と支持基板との接合体
Document Type and Number:
Japanese Patent JP6964210
Kind Code:
B2
Abstract:
(Object) It is to provide a structure for suppressing spurious wave which cannot be suppressed by adjusting the surface morphology of a bonding surface of a piezoelectric material substrate or supporting substrate of a bonded body.(Solution) A bonded body includes a supporting substrate; a piezoelectric material substrate composed of a material selected from the group consisting of lithium niobate, lithium tantalate and lithium niobate-lithium tantalate; and a bonding layer bonding the supporting substrate and piezoelectric material substrate and contacting a main surface of the piezoelectric material substrate. Provided that at least one of a bonding surface of the supporting substrate and a bonding surface of the piezoelectric material substrate is measured by spectral ellipsometry and that Δ is assigned to a difference of phases of p-polarized light and s-polarized light of a reflected light, a difference of the maximum and minimum values of the difference Δ of the phases in a wavelength range of 400nm to 760nm is 70° or lower.
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Inventors:
Yamadera Takahiro
Saki Nakayama
Yuji Hori
Saki Nakayama
Yuji Hori
Application Number:
JP2021504325A
Publication Date:
November 10, 2021
Filing Date:
November 11, 2020
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H03H9/25; G01N21/21
Domestic Patent References:
| JP8148957A | ||||
| JP2016217752A | ||||
| JP2005308612A |
Foreign References:
| WO2017163722A1 |
Attorney, Agent or Firm:
Masumi Hosoda
Juno Aoki
Juno Aoki