Title:
The lighting and the displacement device for a projection aligner
Document Type and Number:
Japanese Patent JP6204922
Kind Code:
B2
Abstract:
An illumination and displacement device for a projection exposure apparatus comprises an illumination optical unit for illuminating an illumination field. An object holder serves for mounting an object in such a way that at least one part of the object can be arranged in the illumination field. An object holder drive serves for displacing the object during illumination in an object displacement direction. A correction device serves for the spatially resolved influencing of an intensity of the illumination at least of sections of the illumination field, wherein there is a spatial resolution of the influencing of the intensity of the illumination of the illumination field at least along the object displacement direction. This results in an illumination and displacement device in which field-dependent imaging aberrations which are present during the projection exposure do not undesirably affect a projection result.
Inventors:
Schneider Sonya
Wobbler norbert
Von Hodenberg Martin
Bitner Boris
Schneider Ricarda
Wobbler norbert
Von Hodenberg Martin
Bitner Boris
Schneider Ricarda
Application Number:
JP2014542754A
Publication Date:
September 27, 2017
Filing Date:
November 05, 2012
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2002100561A | ||||
| JP11003849A | ||||
| JP2002015993A | ||||
| JP2000039505A |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuyuki Taniguchi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Naoki Kondo
Nobuyuki Taniguchi