Title:
Lithography equipment and manufacturing method of articles
Document Type and Number:
Japanese Patent JP6288985
Kind Code:
B2
Inventors:
Kenichiro Mori
Application Number:
JP2013168335A
Publication Date:
March 07, 2018
Filing Date:
August 13, 2013
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20
Domestic Patent References:
| JP2011233781A | ||||
| JP2010135426A | ||||
| JP2005286062A |
Foreign References:
| US20110267595 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu