Title:
A manufacture device of a substrate assembly object
Document Type and Number:
Japanese Patent JP6151122
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing device for a base material assembly capable of easily manufacturing the base material assembly including sealing parts of different shapes or different numbers by highly accurately aligning opposing base materials.SOLUTION: A manufacturing device 100 for a base material assembly is configured to manufacture the base material assembly by pressurizing sealing parts 12 and 22 and depositing a first base material 10 and a second base material 20 within a chamber 1 with which a gas circulation port 1c is formed for circulating gas. The manufacturing device 100 comprises: a first base material support part 11; a second base material support part 21; a moving mechanism capable of moving the first base material support part 11; a guide part 50 which is provided in the first base material support part 11, penetrates the second base material support part 21 and is capable of guiding the second base material support part 21 closer to the first base material support part 11; and a distance adjusting member 60 which is provided between the first base material support part 11 and the second base material support part 21 and capable of adjusting a distance between the first base material support part 11 and the second base material support part 21.
Inventors:
Keisuke Naka
Application Number:
JP2013159823A
Publication Date:
June 21, 2017
Filing Date:
July 31, 2013
Export Citation:
Assignee:
Fujikura Ltd.
International Classes:
H01G9/20; G09F9/00; H01L51/48
Domestic Patent References:
| JP2012199081A | ||||
| JP2011222139A | ||||
| JP2010113830A | ||||
| JP2006202681A |
Attorney, Agent or Firm:
Hiroaki Aoki
Yasuo Morimura
Yasuo Morimura